| 項目名稱 |
指標 |
| 純氫 |
高純氫 |
超純氫 |
| 氫氣（H2）純度（體積分數(shù)）/10-2 ≥ |
99.99 |
99.999 |
99.9999 |
| 氧（O2）含量（體積分數(shù)）/10-4 ≤ |
5 |
1 |
0.2 |
| 氬（Ar）含量（體積分數(shù)）/10-4 ≤ |
供需商定 |
供需商定 |
| 氮（N2）含量（體積分數(shù)）/10-4 ≤ |
60 |
5 |
0.4 |
| 一氧化碳（CO）含量（體積分數(shù)）/10-4 ≤ |
5 |
1 |
0.1 |
| 二氧化碳（CO2）含量（體積分數(shù)）/10-4 ≤ |
5 |
1 |
0.1 |
| 甲烷（CH4）含量（體積分數(shù)）/10-4 ≤ |
10 |
1 |
0.2 |
| 水分（H2O）含量（體積分數(shù)）/10-4 ≤ |
10 |
3 |
0.5 |
| 雜志總含量（體積分數(shù)）/10-4 ≤ |
- |
10 |
1 |
